Controller component The CMTA-II controller is the interface with main controller, sensor and solenoid of the ASPEN II. The components of CMTA-II are:

• CPU Board which is connected to the PC monitoring and does most mapping procedures
• LED and 7-segment LED
• Display Board which displays signal status and mapping results
• Power Supply

Important functions of each composition module of controller are displayed below.

• Wafer Mapping

When cassette door down is followed by door down order of main Aspen-II controller, calibration result of mapping system will operate wafer mapping and send mapping results to Aspen-II main controller and CMTA-II PC monitoring system.

• Error Detect

During the mapping procedure, CMTA-II detects an error and record Display board and send error information to PC monitoring system and notify user and then stops operating cassette door and does not generate door up/down signal to solenoid valve and inform to main controller.(Mattson Tool hold because any kind of wafer sliding or cross slot problem)

• UP and Down Solenoid Drive

Receive door up and down signal from CMTA-II main controller and operate solenoid to up and down.

• Light Curtain Operation

Operates Light Curtain sensor and detects receive light curtain signal operation. While door and light curtain are operating at the same time, the door operation is stopped. When light curtain signal is removed, door operation is continued. (Safety function)

• LED Display

Display with LED’s for mapping results, error detect, and important sensor conditions.

• Signal Interface for Mapping Results

With signal interface J1 and J2 connector, the mapping results from CMTA-II are sent to main controller.

• Read Sensor Condition and Signal Interface for Solenoid Operation Order

CMTA-II has J5 connector to read sensor condition and receive solenoid operation order from main controller.

• Sensor Condition Output and Signal Interface for Solenoid Operation Output

CMTA-II has J4 connector to output sensor condition to the main controller and with solenoid operation order from main controller, creates output signal for operating solenoid.

• PC and Communication Interface

CMTA-II controller is connected to RS232C and PC monitoring system for operation. RS-232C communication is made with J14 connector and its pin configuration is listed below.

• Encoder Interface

CMTA-II uses an encoder to measure accurate position of wafer sensor. The encoder that link to cylinder from ASPEN-II is J15 connector.

• Laser Sensor Interface

Laser sensor interface is linked through j16 connector.

• Power Supply

Power is provided through two connectors, +5v and +24v. Both connectors'Pin configurations are listed below.

• Condition Record
• Mapping Result Record

Mapping results from left and right cassette are displayed in LED's.

• Error/Encoder/ Op. Mode Record

With DIP switch (mode setup) on Display board, record current mapping error condition, current operation mode, and other operating orders to the t-segment LED.

• MODE Switch

Set up controller application mode and Display substances using DIP Switch. Manual mode, control cassette door up and down, laser on and off.

• Reset switch

Reset the CPU to reprogram the CMTA-II controller.